%O Book
%T Ion Beam Techniques for the Analysis of Light Elements in Thin Films, Including Depth Profiling
%A 
%U https://www.iaea.org/publications/7037/ion-beam-techniques-for-the-analysis-of-light-elements-in-thin-films-including-depth-profiling
%D 2004
%I INTERNATIONAL ATOMIC ENERGY AGENCY
%C Vienna