@book{
      international1989iaea,
      title={Analytical Chemistry in Semiconductor Manufacturing: Techniques, Role of Nuclear Methods and Need for Quality Control (Report of a Consultants Meeting, Gaithersburg, Maryland, USA, 2-3 October 1987)},
      author={ },
      series={entity},
      number={512 },
      year={1989},
      isbn={ },
      url={/publications/767/analytical-chemistry-in-semiconductor-manufacturing-techniques-role-of-nuclear-methods-and-need-for-quality-control-report-of-a-consultants-meeting-gaithersburg-maryland-usa-2-3-october-1987 },
      publisher={INTERNATIONAL ATOMIC ENERGY AGENCY },
      address={Vienna}
    }