%O Book
%T Analytical Chemistry in Semiconductor Manufacturing: Techniques, Role of Nuclear Methods and Need for Quality Control (Report of a Consultants Meeting, Gaithersburg, Maryland, USA, 2-3 October 1987)
%A 
%U https://www.iaea.org/publications/767/analytical-chemistry-in-semiconductor-manufacturing-techniques-role-of-nuclear-methods-and-need-for-quality-control-report-of-a-consultants-meeting-gaithersburg-maryland-usa-2-3-october-1987
%D 1989
%I INTERNATIONAL ATOMIC ENERGY AGENCY
%C Vienna